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- Title
Direct electron beam patterning of electro-optically active PEDOT:PSS.
- Authors
Doshi, Siddharth; Ludescher, Dominik; Karst, Julian; Floess, Moritz; Carlström, Johan; Li, Bohan; Mintz Hemed, Nofar; Duh, Yi-Shiou; Melosh, Nicholas A.; Hentschel, Mario; Brongersma, Mark; Giessen, Harald
- Abstract
The optical and electronic tunability of the conductive polymer poly(3,4-ethylenedioxythiophene):poly(styrene sulfonate) (PEDOT:PSS) has enabled emerging applications as diverse as bioelectronics, flexible electronics, and micro- and nano-photonics. High-resolution spatial patterning of PEDOT:PSS opens up opportunities for novel active devices in a range of fields. However, typical lithographic processes require tedious indirect patterning and dry etch processes, while solution-processing methods such as ink-jet printing have limited spatial resolution. Here, we report a method for direct write nano-patterning of commercially available PEDOT:PSS through electron-beam induced solubility modulation. The written structures are water stable and maintain the conductivity as well as electrochemical and optical properties of PEDOT:PSS, highlighting the broad utility of our method. We demonstrate the potential of our strategy by preparing prototypical nano-wire structures with feature sizes down to 250 nm, an order of magnitude finer than previously reported direct write methods, opening the possibility of writing chip-scale microelectronic and optical devices. We finally use the high-resolution writing capabilities to fabricate electrically-switchable optical diffraction gratings. We show active switching in this archetypal system with >95 % contrast at CMOS-compatible voltages of +2 V and −3 V, offering a route towards highly-miniaturized dynamic optoelectronic devices.
- Subjects
DIFFRACTION gratings; OPTICAL devices; FLEXIBLE electronics; INK-jet printing; OPTICAL gratings; ELECTRON beams; CONDUCTING polymers
- Publication
Nanophotonics (21928606), 2024, Vol 13, Issue 12, p2271
- ISSN
2192-8606
- Publication type
Article
- DOI
10.1515/nanoph-2023-0640