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- Title
用于声表面波高温传感应变传递的过渡层薄膜.
- Authors
宋心雨; 金浩; 董树荣; 骆季奎
- Abstract
The surface acoustic wave (SAW) devices are widely used in extreme environmental sensing. Lanthanum gallium silicate(LGS) is a commonly used high-temperature piezoelectric crystal, but at high temperature, the strain glue cannot effectively transmit strain due to the bonding force. The transition layer thin film technology for the strain sensing at high temperature is studied in this paper. A new method and process technology of the transition layer thin film are proposed, which can realize the effect of more stable strain transition of the high temperature strain glue. The results show that the use of sputtering Al re-oxidation can significantly improve the bonding force between LGS and high-temperature glue, so as to realize good strain transfer. A super-large-scale measurement of 1 000 με is realized at 500 ℃ by using this transition layer.
- Subjects
ACOUSTIC surface waves; TRANSITION temperature; THIN films; HIGH temperatures; PYROMETRY; FIBRIN tissue adhesive
- Publication
Piezoelectrics & Acoustooptics, 2022, Vol 44, Issue 6, p851
- ISSN
1004-2474
- Publication type
Article
- DOI
10.11977/j.issn.1004-2474.2022.06.005