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- Title
Flat-top distribution of excimer laser using ultrasonic grating.
- Authors
Liang Lei; Xin Liu; Xiaobo Xing; Qu Wang
- Abstract
A model to achieve flat-top distribution of ultraviolet (UV) excimer laser is presented. Reserving the practically lossless superiority in the traditional diffraction approach, the method improves a diffraction grating with a controllable grating period based on the acousto-optic diffraction effect. A theoretical analysis extending the Huygens-Fresnel principle and Gauss Schell model describing a typically partial coherent source of excimer is proposed, so that a fast Fourier transform numerical simulation could be utilized to calculate the optimized Raman-Nath comprehensive parameter of the acousto-optic medium. Such an excimer homogenous technology could be wisely used in UV lithography and micromachining.
- Subjects
EXCIMER laser research; DIFFRACTION gratings; HUYGENS-Fresnel principle; GAS lasers; DIFFRACTIVE optical elements
- Publication
Optical Engineering, 2014, Vol 53, Issue 6, p1
- ISSN
0091-3286
- Publication type
Article
- DOI
10.1117/1.OE.53.6.065102