Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleComparison of 20- to 1000-Hz pulsed laser and continuous laser ablation of single-crystal germanium wafers.AuthorsSha, YinChuan; Li, ZeWen; Jia, ZhiChao; Han, Bing; Ni, XiaoWuPublicationOptical Engineering, 2023, Vol 62, Issue 3, p36109ISSN0091-3286Publication typeArticleDOI10.1117/1.OE.62.3.036109