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- Title
In-Situ Depth Measurement of Laser Micromachining.
- Authors
Chen, Xiaoming; Xu, Ying; Chen, Nan-Kuang; Shy, Shannon; Chui, Hsiang-Chen
- Abstract
Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical detection system utilizing an optical confocal structure, experimentally confirmed to achieve a >95% accuracy for micron-diameter holes that are tens-of-microns deep. This system can be easily integrated into commercial laser micromachining processes, and can be employed in laser drilling and three-dimensional active-feedback laser printing.
- Subjects
LASER measurement; BATHYMETRY; MICROMACHINING; LASER drilling; LASER printing
- Publication
Photonics, 2021, Vol 8, Issue 11, p493
- ISSN
2304-6732
- Publication type
Article
- DOI
10.3390/photonics8110493