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- Title
Micron-thick ternary relaxor 0.36Pb(In<sub>1/2</sub>Nb<sub>1/2</sub>)O<sub>3</sub>–0.36Pb(Mg<sub>1/3</sub>Nb<sub>2/3</sub>)O<sub>3</sub>–0.28PbTiO<sub>3</sub> thin films with superior pyroelectric response on Si substrate.
- Authors
Yang, Jiaqian; Wu, Zheng; Duan, Zhihua; Li, Chuanqin; Zhou, Helezi; Wang, Tao; Wang, Feifei; Zhao, Xiangyong; Tang, Yanxue; Pan, Han; Leung, Chung Ming
- Abstract
One of the critical challenges in developing high-performance micromachined pyroelectric infrared detector array and piezoelectric micro/nanosensors lies in obtaining excellent sensing thin films with micron thickness. In this study, high-quality ternary 0.36Pb(In1/2Nb1/2)O3–0.36Pb(Mg1/3Nb2/3)O3–0.28PbTiO3 (PIMNT36/36/28) thin films with high-Curie point were prepared on Pt/Ti/SiO2/Si substrates and dense morphology and remarkable dielectric, ferroelectric, piezoelectric, and pyroelectric properties were obtained. Under optimized processing temperature of 650 °C, the remnant polarization of the films reached 19.15 μC/cm2 and large pyroelectric coefficient up to 6.85 × 10–4 C/m2 K was obtained with high figure of merit (Detectivity F d reached 1.96 × 10–5 Pa−1/2 @ 100 Hz for 1 μm-thick PIMNT36/36/28 film). Piezoresponse force microscopy revealed an obvious domain reversal under in situ electric field with "butterfly" shape local piezoelectric response. The superior global performance makes the present PIMNT36/36/28 thin film quite favorable for integrated pyroelectric devices' applications.
- Subjects
THIN films; INFRARED array detectors; PIEZORESPONSE force microscopy; PYROELECTRIC detectors; PIEZOELECTRIC detectors; LEAD titanate
- Publication
Applied Physics A: Materials Science & Processing, 2022, Vol 128, Issue 6, p1
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-022-05668-w