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- Title
Design of an ultraviolet projection lens by using a global search algorithm and computer optimization.
- Authors
Zoric, Nenad; Livshits, Irina; Dilworth, Don; Okishev, Sergey
- Abstract
This paper describes a method for designing an ultraviolet (UV) projection lens for microlithography. Our approach for meeting this objective is to use a starting design automatically obtained by the DSEARCH feature in the SYNOPSYS? lens design program. We describe the steps for getting a desired starting point for the projection lens and discuss optimization problems unique to this system, where the two parts of the projection lens are designed independently.
- Subjects
LENS design &; construction; ULTRAVIOLET sources; MATHEMATICAL optimization; MICROLITHOGRAPHY; SEARCH algorithms
- Publication
Advanced Optical Technologies, 2017, Vol 6, Issue 1, p31
- ISSN
2192-8576
- Publication type
Article
- DOI
10.1515/aot-2016-0058