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- Title
Analytical TEM Characterization of Source/Drain Contacts in Advanced Semiconductor Devices.
- Authors
Li, J.; Niimi, H.; Gluschenkov, O.; Adusumilli, P.; Fronheiser, J.; Mochizuki, S.; Liu, Z.; Kamineni, V.; Raymond, M.; Carr, A. V; Yamashita, T.; Veeraraghavan, B.; Saulnier, N.; Gaudiello, J.
- Abstract
The article focuses on the analytical transmission electron microscopy (TEM) characterization of middle-of-line (MOL) contacts in advanced semiconductor devices, including the impact of rising parasitic resistance and the development of a new integration scheme involving epitaxial growth.
- Subjects
SEMICONDUCTOR devices; HIGH resolution imaging; COPPER
- Publication
Microscopy & Microanalysis, 2019, p8
- ISSN
1431-9276
- Publication type
Article
- DOI
10.1017/S1431927618000533