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- Title
Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow.
- Authors
Shemakhin, A. Yu.
- Abstract
The dependence of the parameters of low-pressure inductively coupled argon plasma (13.3–113 Pa) and field frequency of 13.56 MHz at the coil on the potential applied to the electrode and on gas flow rate up to 4000 sccm is numerically studied. The model is developed in the COMSOL Multiphysics environment and verified with experimental data, as well as over the Knudsen number. As a result of a numerical experiment, it is revealed as follows: when the displacement potential increases linearly, the density of charged particles increases exponentially and a slight increase in the electron temperature is observed; when the gas flow rate increases linearly, the density of charged particles increases exponentially, the density of excited states has an extremum at 2000 sccm, and the gas and electron temperature increases linearly.
- Subjects
POTENTIAL flow; GAS flow; PLASMA potentials; KNUDSEN flow; ELECTRON gas; GLOW discharges; SUPERCONDUCTING magnets
- Publication
Plasma Physics Reports, 2024, Vol 50, Issue 1, p89
- ISSN
1063-780X
- Publication type
Article
- DOI
10.1134/S1063780X23601694