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- Title
Hybrid laser processing for microfabrication of glass.
- Authors
Sugioka, K.; Obata, K.; Hong, M.H.; Wu, D.J.; Wong, L.L.; Lu, Y.F.; Chong, T.C.; Midorikawa, K.
- Abstract
Hybrid laser processing for the precision microfabrication of glass materials, in which the interaction of a conventional pulsed laser beam and a medium on the material surface leads to effective ablation and modification, is reviewed. A major role of the medium is to produce strong absorption of the conventional laser beam by the material. Simultaneous irradiation by a vacuum ultraviolet (VUV) laser beam that possesses an extremely small laser fluence and an ultraviolet (UV) laser greatly improves the ablation quality and modification efficiency for fused silica (VUV-UV multiwavelength excitation process). The metal plasma generated by the laser beam effectively assists high-quality ablation of transparent materials by the same laser beam, resulting in microstructuring, cutting, color marking, printing, and selective metallization of glass materials (laser-induced plasma-assisted ablation (LIPAA)). The detailed discussion presented here includes the ablation mechanism of hybrid laser processing.
- Subjects
LASERS; MICROFABRICATION
- Publication
Applied Physics A: Materials Science & Processing, 2003, Vol 77, Issue 2, p251
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-003-2116-6