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- Title
Micro-hole processing of polyimide film by ultra-short laser pulses and its applications.
- Authors
Ohnishi, Masatoshi; Shikata, Hirokazu; Sakakura, Masaaki; Shimotsuma, Yasuhiko; Miura, Kiyotaka; Hirao, Kazuyuki
- Abstract
Micro machining of a polyimide film with ultra-short pulsed laser was demonstrated. A through-hole with a diameter of less than 10 μm could be produced by optimizing the pulse duration, repetition rate, and number of shots. Thermal damage around the through-hole can be made negligibly small when the pulse duration was shorter than 140 fs. We also found that the minimum shot number needed for the creation of a through-hole becomes smaller as the repetition rate of laser shot increases. On the basis of the optimum irradiation condition, we demonstrated laser cutting of a polyimide film without thermal damage and copper filling in through-holes with diameters of 9 μm by a plating process.
- Subjects
POLYIMIDES; ULTRASHORT laser pulses; IRRADIATION; POLYMERS; LASER beams
- Publication
Applied Physics A: Materials Science & Processing, 2010, Vol 98, Issue 1, p123
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-009-5450-5