Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleRecent Progress in Neural Probes Using Silicon MEMS Technology.AuthorsRuther, Patrick; Herwik, Stanislav; Kisban, Sebastian; Seidl, Karsten; Paul, OliverPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2010, Vol 5, Issue 5, p505ISSN1931-4973Publication typeArticleDOI10.1002/tee.20566