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- Title
Microstructure and texture evolution of CeO buffer layers fabricated via CSD method in reducing atmosphere with different flow rates.
- Authors
Wang, Y.; Li, C.; Yu, Z.; Feng, J.; Jin, L.; Wang, H.; Odier, P.; Zhang, P.
- Abstract
We analyzed the texture and microstructure evolution of CeO buffer layers fabricated on NiW (00 l) substrates by chemical solution deposition methods in reducing gas with different flow rates. The texture and morphology of CeO films were examined by X-ray diffraction and atomic force microscopy. Results show that CeO films with preferred (00 l) orientation have been obtained in Ar-4%H with flow rate greater than 1.95 × 10m/s. The crystalline degree and texture degree of CeO films are strongly dependent on flow rate of reducing gas. Moreover, the larger flow rate of reducing gas is helpful to the formation of single-phase CeO film and the decrease of RMS of CeO films. The texture and microstructure evolution of CeO thin film is related to the oxygen vacancies concentration in CeO lattice.
- Subjects
CERIUM oxides; MICROFABRICATION; MICROSTRUCTURE; SUBSTRATES (Materials science); NICKEL compounds; MATERIALS texture
- Publication
Journal of Materials Science: Materials in Electronics, 2014, Vol 25, Issue 10, p4623
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-014-2213-7