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- Title
Electrical, structural and morphological characteristics of rapidly annealed Pd/n-InP (100) Schottky structure.
- Authors
Ashok Kumar, A.; Janardhanam, V.; Rajagopal Reddy, V.
- Abstract
The electrical and structural properties of the Pd/InP (100) Schottky barrier diodes have been investigated as a function of annealing temperature by current-voltage (I-V), capacitance-voltage (C-V) and X-ray diffraction (XRD) measurements. The Schottky barrier height of the as-deposited, 100 and 200°C annealed contacts determined from the I-V and C-V measurements are 0.56 and 0.81 eV, 0.57 and 0.81 eV, and 0.58 and 0.82 eV, respectively. However, both the measurements showed that the Schottky barrier height of the Pd/n-InP Schottky contact is increased to 0.59 eV (I-V) and 0.83 eV (C-V) when the contact is annealed at 300°C for 1 min in nitrogen atmosphere. Further Schottky barrier height decreases to 0.57 eV (I-V), 0.71 eV (C-V) and 0.53 eV (I-V), 0.67 eV (C-V) after annealing at 400 and 500°C samples. The result shows that the optimum annealing temperature for the Pd/InP Schottky diode is 300°C. Norde method is also used to determine the barrier height of Pd Schottky contacts and the values are 0.56 eV for the as-deposited contact, 0.57, 0.57, 0.58, 0.57 and 0.54 eV for contacts annealed at 100, 200, 300, 400 and 500°C which are consistent with the values obtained by the I-V measurements. From the atomic force microscopy results, it is evident that the overall surface morphology of the Pd/InP Schottky diode is fairly smooth. Based on the XRD results, the formation of phosphorus-oxygen compounds at the interface may be responsible for the variation in barrier heights observed in Pd/InP Schottky contacts with annealing temperature.
- Subjects
SCHOTTKY barrier diodes; OPTICAL diffraction; CAPACITANCE meters; COMPOUND semiconductors; MORPHOLOGY; ATOMIC force microscopy
- Publication
Journal of Materials Science: Materials in Electronics, 2011, Vol 22, Issue 7, p854
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-010-0225-5