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- Title
Flash Lamp Annealing of ITO thin films on ultra-thin glass.
- Authors
Weller, Stephanie; Junghähnel, Manuela
- Abstract
Ultra-fast thermal annealing of thin films with annealing times of few milliseconds are faster und more energy efficient than conventional furnace annealing methods. By using flash lamp annealing, only the surface is heated while the substrate remains cold. This allows the refinement of indium-tin-oxide films on rigid and ultra-thin flexible glass and improves their conductivity and transmittance.
- Subjects
INCOHERENT light annealing; THIN films; INDIUM tin oxide; THERMAL conductivity; TRANSMITTANCE (Physics)
- Publication
Vakuum in Forschung und Praxis, 2015, Vol 27, Issue 4, p29
- ISSN
0947-076X
- Publication type
Article
- DOI
10.1002/vipr.201500586