Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitlePlasmatechnik - meist unsichtbar, aber unverzichtbar für die Zukunft. Plasma Technology - mostly invisible, but important for the future.AuthorsReichel, KarinPublicationVakuum in Forschung und Praxis, 2005, Vol 17, Issue 4, p204ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200500261