Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleNews - Vakuum in Forschung und Praxis 2/2004.PublicationVakuum in Forschung und Praxis, 2004, Vol 16, Issue 2, p99ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200490017