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- Title
An iron (II) guanidinate compound: Synthesis, characterization, thermal properties and its application as a CVD precursor for iron oxide film.
- Authors
Zhang, Yuxiang; Du, Liyong; Liu, Xinfang; Ding, Yuqiang
- Abstract
An iron compound containing guanidinate ligand [Fe((SiMe3)2NC(iPrN)2)2] was synthesized using a conventional lithium‐salt‐elimination reaction, and its chemical structure was characterized through elemental analysis, 1H‐NMR and single‐crystal X‐ray diffraction, respectively. The thermal properties of the compound were examined through thermogravimetric analysis (TGA), and the TGA results demonstrated that the compound possessed sufficient volatility and suitable thermal stability for the CVD process. Moreover, the deposition experiments were conducted using the synthesized compound as a precursor and O2 as an oxygen source to confirm its applicability as a CVD precursor, and α‐Fe2O3 films were successfully deposited at a relatively low deposition temperature (300°C).
- Subjects
FERRIC oxide; OXIDE coating; THERMAL properties; CHEMICAL vapor deposition; THERMAL stability; IRON compounds; IRON oxides
- Publication
Applied Organometallic Chemistry, 2019, Vol 33, Issue 8, pN.PAG
- ISSN
0268-2605
- Publication type
Article
- DOI
10.1002/aoc.4981