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- Title
Design and Fabrication of MEMS Micropumps using Double Sided Etching.
- Authors
Yunas, Jumril; Johari, Juliana; Hamzah, A. A.; Gebeshuber, Ille C.; Majlis, Burhanuddin Yeop
- Abstract
In this paper, we report a simple technique for the fabrication of planar valveless micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch technique. Instead of using several masks and process steps, an anisotropic wet etch technique at both sides of a silicon substrate is implemented at the same time for creating the pump membrane and the diffuser/nozzle elements. A planar diffuser and a nozzle element of the pump, as well as a 150 μm thick silicon membrane, are designed and fabricated using only three pattern process steps. An actuator-chamber and a pump-chamber with depths of 250 μm are formed after 250 mm KOH etching, while the diffuser/nozzle element with a depth of 50 μm are sequentially formed after chamber forming. The process is simple and reproducible which opens the opportunity for fast prototyping of MEMS micropumps.
- Subjects
MICROELECTROMECHANICAL system design &; construction; ELECTROMAGNETIC pumps; AUTOMATIC control systems; SILICON; SEMICONDUCTOR etching; ENGRAVING; FLUID dynamics; NOZZLES; RAPID prototyping
- Publication
Journal of Microelectronic & Electronic Packaging, 2010, Vol 7, Issue 1, p44
- ISSN
1551-4897
- Publication type
Article
- DOI
10.4071/1551-4897-7.1.44