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- Title
SYMMETRIC AFM CANTILEVER FOR MECHANICAL CHARACTERIZATION OF Mo THIN FILM.
- Authors
HAK-JOO LEE; JAE-HYUN KIM; KIHO CHO; JAE-YOON KANG; CHANG-WOOK BAEK; JONG-MAN KIM; SUNG-HOON CHOA
- Abstract
We have developed a novel method and device for measuring the mechanical properties of micro/nano structures. An atomic force microscope (AFM) was employed to sense applied force and displacement and a new AFM cantilever which overcame the critical problems associated with conventional AFM cantilever systems was fabricated using single crystal silicon (110). The symmetrically designed cantilever removed lateral motion of the probe during indentation and strip bending tests. Strip bending tests on fixed-fixed molybdenum (Mo) strips 1 μm in thickness using the assembled cantilever in AFM system showed that consistent load-displacement curves can be obtained. The effect of adhesive energy on mechanical tests in micro/nano-scale was revealed.
- Subjects
MECHANICAL properties of metals; OPTICAL instruments; NANOSTRUCTURES; NONMETALS; SILICON; CHEMICAL elements
- Publication
International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics, 2006, Vol 20, Issue 25-27, p3781
- ISSN
0217-9792
- Publication type
Article
- DOI
10.1142/S0217979206040362