Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleNano-scale Fracture Test for Local Interface Adhesion Strength Evaluation in LSI Interconnects.AuthorsShishido, N.; Sugiyama, H.; Kamiya, S.; Omiya, M.; Nagasawa, T.; Nokuo, T.; Suzuki, T.; Nakamura, T.AbstractExtended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.SubjectsLARGE scale integration of circuits; ADHESIONPublicationMicroscopy & Microanalysis, 2012, Vol 18, Issue S2, p766ISSN1431-9276Publication typeAbstractDOI10.1017/S1431927612005685