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- Title
Dual Coil Patterned Ultra‐Thin Silicon Film Enable by Double‐Sided Process (Adv. Mater. Interfaces 16/2023).
- Authors
Son, ChangHee; Lee, Sangyeop; Ferreira, Placid M.; Kim, Seok
- Abstract
Actuators, double-sided process, multiphysics simulation, energy harvesters, ultra-thin silicon, vibrating mirrors Keywords: actuators; double-sided process; energy harvesters; multiphysics simulation; ultra-thin silicon; vibrating mirrors EN actuators double-sided process energy harvesters multiphysics simulation ultra-thin silicon vibrating mirrors 1 1 1 06/08/23 20230606 NES 230606 B Double-Sided Microfabrication b Handling ultra-thin silicon (UTS) has been challenging and current techniques are mostly limited to bonding UTS to another substrate. Dual Coil Patterned Ultra-Thin Silicon Film Enable by Double-Sided Process (Adv.
- Subjects
SILICON films; LASER beams
- Publication
Advanced Materials Interfaces, 2023, Vol 10, Issue 16, p1
- ISSN
2196-7350
- Publication type
Article
- DOI
10.1002/admi.202370053