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- Title
Design and realisation of radio-frequency attenuators based on microelectromechanical system switches.
- Authors
Xueli Nan; Binzhen Zhang; Xin Yang; Shaolei Ge
- Abstract
Radio-frequency (RF) attenuators showunique advantages and a great development potential in phased array radars.Akind of programmable step attenuators with high precision based on contact-type microelectromechanical system series switches is proposed herein. This work paid attention to the design and fabrication of switches - the key components of attenuators. By setting up vent holes on the pull-down plates of switches, the mass of plateswas reduced, together with the decreased influence of air damping. Meanwhile, switcheswere manufactured and packaged through ultraviolet lithography (UV-LIGA) technology with the S parameter test being performed. Results showed that the insertion loss in a range of 0.3 and 1.8 dB under the condition that attenuation modules are short-circuited at the same time, which is basically the same with the simulation results of 0.1-1.3 dB. While all the return losses S11 were <15 dB expect from that at 10 dB. In addition, the designed attenuator showed gentle attenuation in a range of DC~ 20 GHz. However, on the whole, the deviation is controlled within 2 dB, which is basically consistent with the design results of 1 dB. It can be found from the obtained results that all indices of the attenuator satisfied the design requirements.
- Subjects
RADIO frequency; RADIO attenuators; PHASED array radar; MICROELECTROMECHANICAL systems; SEMICONDUCTOR switches
- Publication
Micro & Nano Letters (Wiley-Blackwell), 2016, Vol 11, Issue 11, p702
- ISSN
1750-0443
- Publication type
Article
- DOI
10.1049/mnl.2016.0191