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- Title
Effect of in situ ultraviolet irradiation on the formation of nanostructural carbon nitride films.
- Authors
Shalaev, R. V.; Prudnikov, A. M.; Ulyanov, A. N.; Shin, G. M.; Yoo, S. I.; Linnik, A. I.; Linnik, T. A.; Burkhovetskii, V. V.; Varyukhin, V. N.
- Abstract
We report the effect of in situ ultraviolet (UV) irradiation on the formation of carbon nitride CN x films. The nanocolumnar films were produced under UV irradiation without a metal catalyst by dc magnetron sputtering of a graphite target in an N2 atmosphere with 3% of O2 on a quartz glass substrate. It was shown that films have dense nanostructure with columns of 60-80 nm in diameter and with nitrogen concentration of ∼4%. Scanning electron microscopy (SEM) and X-ray photoemission spectroscopy (XPS) data show the coexistence of amorphous and columnar phases. In situ UV irradiation was found to be effective for growing the pure nanocolumnar structure of carbon nitride by etching the amorphous phase.
- Publication
Physica Status Solidi. A: Applications & Materials Science, 2012, Vol 209, Issue 7, p1287
- ISSN
1862-6300
- Publication type
Article
- DOI
10.1002/pssa.201228069