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Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.
Published in:
Journal of Structural Chemistry, 2024, v. 65, n. 8, p. 1488, doi. 10.1134/S002247662408002X
By:
- Ermakova, E. N.;
- Maksimovsky, E. A.;
- Fedorenko, A. D.;
- Shapovalova, A. A.;
- Khizhnyak, E. A.;
- Kosinova, M. L.
Publication type:
Article
Nano-Sized Copper Films Prepared by Magnetron Sputtering.
Published in:
Journal of Structural Chemistry, 2023, v. 64, n. 12, p. 2438, doi. 10.1134/S0022476623120156
By:
- Sulyaeva, V. S.;
- Shayapov, V. R.;
- Syrokvashin, M. M.;
- Kozhevnikov, A. K.;
- Kosinova, M. L.
Publication type:
Article
SYNTHESIS FEATURES AND STRUCTURAL CHARACTERIZATION OF CARBON NANOWALLS PREPARED FROM ORGANOBORON COMPOUNDS.
Published in:
Journal of Structural Chemistry, 2022, v. 63, n. 7, p. 1180, doi. 10.1134/S0022476622070125
By:
- Maksimovskii, E. A.;
- Maslova, O. V.;
- Semenova, O. I.;
- Vasileva, I. G.;
- Kosinova, M. L.
Publication type:
Article
DIELECTRIC LAYERS BCxNy: SYNTHESIS BY THE DECOMPOSITION OF VAPORS OF ORGANOBORON COMPOUNDS, COMPOSITION AND CHEMICAL STRUCTURE.
Published in:
Journal of Structural Chemistry, 2021, v. 62, n. 10, p. 1631, doi. 10.1134/S0022476621100188
By:
- Sulyaeva, V. S.;
- Kesler, V. G.;
- Kosinova, M. L.
Publication type:
Article
CHEMICAL STRUCTURE AND FUNCTIONAL PROPERTIES OF AMORPHOUS BORON CARBONITRIDE FILMS.
Published in:
Journal of Structural Chemistry, 2021, v. 62, n. 8, p. 1309, doi. 10.1134/S0022476621080187
By:
- Sulyaeva, V. S.;
- Gatapova, E. Ya.;
- Kozhevnikov, A. K.;
- Rogilo, D. I.;
- Saraev, A. A.;
- Yushina, I. V.;
- Khomyakov, M. N.;
- Shapovalova, A. A.;
- Shayapov, V. R.;
- Bhaskar, N.;
- Tu, R.;
- Kosinova, M. L.
Publication type:
Article
(Allylamino)silanes: Synthesis, Properties, and Prospects of Use in Producing New Materials.
Published in:
Russian Journal of General Chemistry, 2021, v. 91, n. 10, p. 1957, doi. 10.1134/S1070363221100054
By:
- Sysoev, S. V.;
- Mareev, A. V.;
- Tsyrendorzhieva, I. P.;
- Maximovskiy, E. A.;
- Isakov, A. V.;
- Maslova, O. V.;
- Kosinova, M. L.
Publication type:
Article
Theoretical model for describing degradation of thin hydrogen-containing films.
Published in:
Technical Physics, 1997, v. 42, n. 8, p. 950, doi. 10.1134/1.1258760
By:
- Gadiyak, G. V.;
- Gadiyak, V. G.;
- Kosinova, M. L.;
- Sal’man, E. G.
Publication type:
Article
Synthesis of Zirconium Diboride Films and ZrB2/BCxNy Heterostructures.
Published in:
Inorganic Materials, 2018, v. 54, n. 2, p. 133, doi. 10.1134/S0020168518020152
By:
- Sulyaeva, V. S.;
- Shestakov, V. A.;
- Rumyantsev, Yu. M.;
- Kosinova, M. L.
Publication type:
Article
Properties of BC xN y films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures.
Published in:
Inorganic Materials, 2010, v. 46, n. 5, p. 487, doi. 10.1134/S0020168510050092
By:
- Sulyaeva, V. S.;
- Kosinova, M. L.;
- Rumyantsev, Yu. M.;
- Golubenko, A. N.;
- Fainer, N. I.;
- Alferova, N. I.;
- Ayupov, B. M.;
- Gevko, P. N.;
- Kesler, V. G.;
- Kolesov, B. A.;
- Maksimovskii, E. A.;
- Myakishev, K. G.;
- Yushina, I. V.;
- Kuznetsov, F. A.
Publication type:
Article
Thermodynamic modeling of BC xN y chemical vapor deposition from mixtures of N-trimethylborazine and nitrogen.
Published in:
Inorganic Materials, 2009, v. 45, n. 12, p. 1342, doi. 10.1134/S0020168509120061
By:
- Golubenko, A. N.;
- Kosinova, M. L.;
- Sulyaeva, V. S.;
- Rumyantsev, Yu. M.;
- Fainer, N. I.;
- Kuznetsov, F. A.
Publication type:
Article
Thermodynamic Modeling of BCxNy Chemical Vapor Deposition in the B–C–N–H System.
Published in:
Inorganic Materials, 2003, v. 39, n. 4, p. 362, doi. 10.1023/A:1023275631975
By:
- Golubenko, A. N.;
- Kosinova, M. L.;
- Titov, A. A.;
- Kuznetsov, F. A.
Publication type:
Article
Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane.
Published in:
Inorganic Materials, 2003, v. 39, n. 4, p. 366, doi. 10.1023/A:1023227716045
By:
- Kosinova, M. L.;
- Rumyantsev, Yu. M.;
- Golubenko, A. N.;
- Fainer, N. I.;
- Ayupov, B. M.;
- Dolgovesova, I. P.;
- Kolesov, B. A.;
- Kaichev, V. V.;
- Kuznetsov, F. A.
Publication type:
Article
Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma.
Published in:
Glass Physics & Chemistry, 2019, v. 45, n. 6, p. 525, doi. 10.1134/S108765961906018X
By:
- Shayapov, V. R.;
- Chagin, M. N.;
- Kolodin, A. N.;
- Kosinova, M. L.
Publication type:
Article
Synthesis and Properties of Thin Films Formed by Vapor Deposition from Tetramethylsilane in a Radio-Frequency Inductively Coupled Plasma Discharge.
Published in:
Glass Physics & Chemistry, 2018, v. 44, n. 3, p. 174, doi. 10.1134/S1087659618030124
By:
- Rumyantsev, Yu. M.;
- Chagin, M. N.;
- Shayapov, V. R.;
- Yushina, I. V.;
- Kichai, V. N.;
- Kosinova, M. L.
Publication type:
Article
N-bromohexamethyldisilazane: Investigation of properties and thermodynamic simulation of precipitation of thin-layer structures from the vapor phase.
Published in:
Glass Physics & Chemistry, 2011, v. 37, n. 1, p. 60, doi. 10.1134/S1087659611010123
By:
- Rakhlin, V. I.;
- Nikulina, L. D.;
- Sysoev, S. V.;
- Chernyavskii, L. I.;
- Kosinova, M. L.;
- Titov, A. A.;
- Podgorbunskaya, T. A.;
- Voronkov, M. G.
Publication type:
Article
Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane.
Published in:
Glass Physics & Chemistry, 2010, v. 36, n. 4, p. 497, doi. 10.1134/S1087659610040152
By:
- Kosinova, M. L.;
- Rumyantsev, Yu. M.;
- Chernyavskii, L. I.;
- Nikulina, L. D.;
- Kesler, V. G.;
- Maximovskii, E. A.;
- Fainer, N. I.;
- Rakhlin, V. I.;
- Voronkov, M. G.;
- Kuznetsov, F. A.
Publication type:
Article

Found: 16

Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia.

Nano-Sized Copper Films Prepared by Magnetron Sputtering.

SYNTHESIS FEATURES AND STRUCTURAL CHARACTERIZATION OF CARBON NANOWALLS PREPARED FROM ORGANOBORON COMPOUNDS.

DIELECTRIC LAYERS BC<sub>x</sub>N<sub>y</sub>: SYNTHESIS BY THE DECOMPOSITION OF VAPORS OF ORGANOBORON COMPOUNDS, COMPOSITION AND CHEMICAL STRUCTURE.

CHEMICAL STRUCTURE AND FUNCTIONAL PROPERTIES OF AMORPHOUS BORON CARBONITRIDE FILMS.

(Allylamino)silanes: Synthesis, Properties, and Prospects of Use in Producing New Materials.

Theoretical model for describing degradation of thin hydrogen-containing films.

Synthesis of Zirconium Diboride Films and ZrB<sub>2</sub>/BC<sub>x</sub>N<sub>y</sub> Heterostructures.

Properties of BC<sub> x</sub>N<sub> y</sub> films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures.

Thermodynamic modeling of BC<sub> x</sub>N<sub> y</sub> chemical vapor deposition from mixtures of N-trimethylborazine and nitrogen.

Thermodynamic Modeling of BC<sub>x</sub>N<sub>y</sub> Chemical Vapor Deposition in the B–C–N–H System.

Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane.

Deposition of Films from a Mixture of Hexamethylcyclotrisilazane Vapor and Argon in Inductively Coupled Plasma.

Synthesis and Properties of Thin Films Formed by Vapor Deposition from Tetramethylsilane in a Radio-Frequency Inductively Coupled Plasma Discharge.

N-bromohexamethyldisilazane: Investigation of properties and thermodynamic simulation of precipitation of thin-layer structures from the vapor phase.

Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane.