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- Title
Fully Transparent Friction‐Modulation Haptic Device Based on Piezoelectric Thin Film.
- Authors
Glinsek, Sebastjan; Mahjoub, Mohamed Aymen; Rupin, Matthieu; Schenk, Tony; Godard, Nicolas; Girod, Stéphanie; Chemin, Jean‐Baptiste; Leturcq, Renaud; Valle, Nathalie; Klein, Sébastien; Chappaz, Cédrick; Defay, Emmanuel
- Abstract
Standing Lamb waves in vibrating plates enable haptic interfaces. If the out‐of‐plane displacement of these waves exceeds 1 µm at frequencies above 25 kHz, a silent friction modulation can be created between a human finger and a vibrating plate. A fully transparent friction‐modulation haptic device based on a piezoelectric thin film is demonstrated. The antisymmetric Lamb mode induced at 73 kHz allows for a functional performance that fulfills all conditions for practical use. Out‐of‐plane displacement reaches 2.9 µm when 150 V unipolar voltage is applied. The average transmittance of the whole transducer reaches 75%. The key points of this technology are: 1) a thin HfO2 layer between lead zirconate titanate film and substrate that prevents chemical reaction between them; 2) the efficient integration of transparent indium tin oxide electrodes and solution‐derived piezoelectric lead zirconate titanate thin film onto optical‐grade fused silica; and 3) the use of a transparent insulating layer made of SU‐8 photoresist.
- Subjects
LEAD zirconate titanate; PIEZOELECTRIC thin films; LEAD zirconate titanate films; HAPTIC devices; PIEZOELECTRIC devices; LAMB waves; STANDING waves
- Publication
Advanced Functional Materials, 2020, Vol 30, Issue 36, p1
- ISSN
1616-301X
- Publication type
Article
- DOI
10.1002/adfm.202003539