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- Title
Характеристики і параметри плазми перенапруженого наносекундного розряду між мідними електродами в арґоні
- Authors
Шуаібов, О. К.; Малініна, А. О.; Грицак, Р. В.; Малінін, О. М.; Білак, Ю. Ю.; Гомокі, З. Т.; Ватрала, М. І.
- Abstract
The characteristics and parameters of the overvoltage bipolar discharge of nanosecond duration between copper electrodes in argon at a pressure of 6.7 kPa are given. In the process of microexplosions of inhomogeneities on the working surfaces of copper electrodes in a strong electric field in the gap between the electrodes are made of copper vapour. This creates the preconditions for the synthesis of thin nanostructured copper films, which can be deposited on a dielectric substrate (quartz, glass, ceramics) installed near the center of the discharge gap. The spatial characteristics of the discharge, voltage pulses on the discharge interval of d = 2 and 7 mm, pulses of the discharge current, pulse power of the discharge and energy contribution to the discharge per pulse are studied. Plasma radiation spectra and oscillograms of radiation of the most intense spectral lines and bands are studied by the method of emission spectroscopy with high time separation, which allowed to establish the main excited products formed in plasma. The optimization of the time-averaged UV-radiation of the point emitter depending on the supply voltage of the high-voltage modulator and the repetition frequency of the discharge pulses is carried out. Using the method of numerical modeling of nanosecond discharge plasma parameters based on copper vapour in medium pressure argon by solving the Boltzmann kinetic equation for the electron energy distribution function (FREE), we calculated the mobility, temperature and density of electrons in plasma, and their rate constants depending on the value of the E/N parameter for the plasma studied experimentally.
- Subjects
COPPER electrodes; ELECTRON density; ELECTRON kinetic energy; PLASMA products; COPPER films; ELECTRON temperature; PLASMA flow
- Publication
Metallophysics & Advanced Technologies / Metallofizika i Novejsie Tehnologii, 2021, Vol 43, Issue 12, p1683
- ISSN
1024-1809
- Publication type
Article
- DOI
10.15407/mfint.43.12.1683