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- Title
Effect of the Target Surface Temperature on the Distribution of Nanoparticles Formed by Ion Implantation.
- Authors
Stepanov, A. L.; Hole, D.; Popok, V. N.
- Abstract
Metal-nanoparticle-containing composite layers were synthesized by implantation of 60 keV Ag[sup +] ions into a soda-lime silicate glass to a dose of 3 × 10[sup 16] ion/cm² at an ion beam current density of 3 µA/cm² and a substrate temperature of 35°C. The results of implantation depend on the temperature effects developed in the glass targets of various thicknesses. Data on the silver distribution profile and the nucleation and growth of metal nanoparticles in depth of the implanted layers were obtained from the optical reflection spectra. It is demonstrated that even small variations in the surface temperature of the ion-bombarded glass substrate lead to significant changes in the conditions of nanoparticle formation in the sample.
- Subjects
NANOPARTICLES; COMPOSITE materials; PHYSICS
- Publication
Technical Physics Letters, 2001, Vol 27, Issue 7, p554
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/1.1388941