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- Title
Numerical simulation of the ablation of thin molybdenum films under laser irradiation.
- Authors
Kazanskiy, N.; Poletayev, S.
- Abstract
Laser irradiation of a molybdenum film on a quartz substrate is numerically studied. The simulated results prove the experimental effect lying in a threefold decrease in the size of the ablation region in comparison with the focal spot. The numerical experiment proves the hypothesis on the two-stage ablation of metal film with the primary formation of oxide phase. It is demonstrated that oxidation leads to a selective decrease in the thermal resistance of the film along the vertical direction, so that the anisotropic character of the ablation is enhanced.
- Subjects
MOLYBDENUM; THIN films; QUARTZ; LASER beams; LASER ablation; METALLIC films; OXIDATION; THERMAL resistance
- Publication
Technical Physics, 2016, Vol 61, Issue 9, p1279
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/S1063784216090127