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- Title
3-D microstructuring inside photosensitive glass by femtosecond laser excitation.
- Authors
Masuda, M.; Sugioka, K.; Cheng, Y.; Aoki, N.; Kawachi, M.; Shihoyama, K.; Toyoda, K.; Helvajian, H.; Midorikawa, K.
- Abstract
We show that a femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties of transparency, hardness and chemical and thermal resistances. The photosensitivity arises from the cerium in the glass. After exposure to a focused laser beam, latent images are written. Modified regions are developed by a post-baking process and then preferentially etched away in a 10% dilute solution of hydrofluoric acid at room temperature. We have measured the critical dose for modification of the photosensitive glass, and fabricated 3-D microstructures with microcells and hollow microchannels embedded in the glass based on the critical dose.
- Subjects
PHOTOSENSITIVE glass; LASERS; MICROSTRUCTURE
- Publication
Applied Physics A: Materials Science & Processing, 2003, Vol 76, Issue 5, p857
- ISSN
0947-8396
- Publication type
Article
- DOI
10.1007/s00339-002-1937-z