Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleFabrication of metallic nanopatterns using the vacuum type UV-NIL equipment.AuthorsFukuhara, Makoto; Mizuno, Jun; Saito, Mikiko; Homma, Takayuki; Shoji, ShuichiPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2007, Vol 2, Issue 3, pxviiISSN1931-4973Publication typeArticleDOI10.1002/tee.20179