We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Thickness and mosaic morphology of InAs films grown by LPE supercooling technique.
- Authors
Deng, H. Y.; Wang, Q. W.; Wu, J.; Hu, S. H.; Chen, X.; Dai, N.
- Abstract
InAs films with different thicknesses were fabricated on (100)-oriented InAs substrate by liquid phase epitaxy supercooling technique using the sliding graphite boat. The X-ray diffraction measurement shows that films exhibit (100)-preferred crystal orientation. The film thickness dependence on the growth time and cooling rate was investigated by scanning electron microscope and the growth kinetics was analyzed based on one-dimensional diffusion theory. The experimental data were fitted very well by the supercooling equation, and the fitted diffusion coefficient at 520 °C was 6.2 × 10 cm/s. The newly observed mosaic morphology was probably caused by the shake of the growth solution due to sliding the graphite boat.
- Subjects
SUPERCOOLING; MOSAIC pavements; LIQUID phase epitaxy; DIFFUSION processes; GRAPHITIZATION; X-ray diffraction
- Publication
Journal of Materials Science: Materials in Electronics, 2011, Vol 22, Issue 7, p811
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-010-0216-6