Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleLaser technology: Microfabrication of thin films.AuthorsBoyd, Ian W.; Micheli, F.PublicationNature, 1986, Vol 321, Issue 6071, p649ISSN0028-0836Publication typeArticleDOI10.1038/321649a0