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- Title
AlN film SAW resonator integrated with metal structure.
- Authors
Lin Shu; Jianying Jiang; Bin Peng; Yu Wang; Xingzhao Liu
- Abstract
A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid-frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two-step growth method, AlN film with a full-width at half-maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring.
- Subjects
ACOUSTIC surface waves; SURFACE acoustic wave resonators; ACOUSTIC surface wave devices; CRYSTAL resonators; ELECTRONICS
- Publication
Electronics Letters (Wiley-Blackwell), 2015, Vol 51, Issue 5, p379
- ISSN
0013-5194
- Publication type
Article
- DOI
10.1049/el.2014.3495