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- Title
Development of Lead-free Force-feedback Tactile Sensor Fabricated from BiFeO<sub>3</sub> Piezoelectric Film.
- Authors
Lin, David T. W.; Kun-Dar Li; Po-Chang Chen; Jia-Yun Kuo
- Abstract
The develop a flexible lead-free BiFeO3 (BFO) film sensor that can be applied on complex surfaces of devices, and sensor is fabricated by depositing BFO thin film on a polyimide-coated copper substrate. Topics include spin-coating processes under three different sets of parameters and two different annealing temperatures are used in the fabrication; and X-ray diffraction and scanning electron microscopy are used to examine the crystallinity and surface topography of the BFO thin films.
- Subjects
TACTILE sensors; PIEZOELECTRIC thin films; MATERIALS science; NUMERICAL control of machine tools; PIEZOELECTRICITY; CHEMICAL engineering
- Publication
Sensors & Materials, 2021, Vol 33, Issue 10,part 2, p3603
- ISSN
0914-4935
- Publication type
Article
- DOI
10.18494/SAM.2021.3623