Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleInhalt: Vakuum in Forschung und Praxis 2/2012.PublicationVakuum in Forschung und Praxis, 2012, Vol 24, Issue 2, p4ISSN0947-076XPublication typeArticleDOI10.1002/vipr.201290018