Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleVibration control for pneumatic isolation table with feedforward control input.AuthorsKoike, Masakazu; Nakata, Takumi; Zhang, Feifei; Tahara, JunichiroPublicationElectrical Engineering in Japan, 2019, Vol 207, Issue 3, p35ISSN0424-7760Publication typeArticleDOI10.1002/eej.23187