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- Title
Effect of Mass and Charge of Ionic Species on Spatio-Temporal Evolution of Transient Electric Field in CCP Discharges.
- Authors
Sharma, S.; Mishra, S. K.; Kaw, P. K.; Turner, M. M.; Karkari, S. K.
- Abstract
The formation of capacitive sheath and existence of the transition electric field between sheath edge and bulk plasma in RF-CCP discharge is predicted ( PRL 89, 265006 2002); such structures are sensitive to the plasma composition. On the basis of semi-infinite particle-in-cell (PIC) simulation the effect of charge and mass of ionic species on the spatio-temporal evolution of the transient electric field and phase mixing phenomena in linear and weakly nonlinear regime has been explored. As an important feature, the simulation results predict that the maximum amplitude of the transient electric field decreases with increasing ionic mass and charge; further the sheath width increases with increasing ionic mass while follow opposite trend with increasing ionic charge. The excitation of wave like structures in the transition region and efficient energy transport to the bulk region of CCP discharges in a nonlinear regime has also been predicted. (© 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
- Subjects
ELECTRIC fields; RADIO frequency discharges; ENERGY transfer; PLASMA sheaths; PLASMA density; ELECTRONIC excitation; ELECTROSTATIC fields
- Publication
Contributions to Plasma Physics, 2015, Vol 55, Issue 4, p331
- ISSN
0863-1042
- Publication type
Article
- DOI
10.1002/ctpp.201400077