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- Title
Thin Fullerene-Containing Films Synthesized by Ion Beam Sputtering of Fullerene Mixtures with Doping Additives in Vacuum.
- Authors
Semenov, A. P.; Semenova, I. A.; Bulina, N. V.; Lopatin, V. A.; Karmanov, N. S.; Churilov, G. N.
- Abstract
A new approach to the synthesis of films containing fullerenes and doping elements is described. It is suggested that a cluster mechanism of the target sputtering by accelerated ions makes possible the deposition of fullerenes on a substrate with a certain probability for dopant atoms being introduced into the cavities of fullerene molecules and a higher probability of their occurrence between fullerene molecules. The proposed method has been experimentally implemented by using an Ar+ ion beam to sputter C60 /C70 fullerene mixtures (synthesized in a plasmachemical reactor at a pressure of 105 Pa) pressed into disk targets with a doping element (Fe, Na, B, Gd, or Se). The ion beam sputtering of dopant-containing fullerene mixtures in a vacuum of ∼10–2 Pa allowed micron-thick films containing C60 and C70 fullerenes and the corresponding dopant element (Fe, Na, B, Gd, or Se) to be grown on quartz substrates. © 2005 Pleiades Publishing, Inc.
- Subjects
FULLERENES; IONS; ION bombardment; THICK films; SPUTTERING (Physics)
- Publication
Technical Physics Letters, 2005, Vol 31, Issue 12, p1022
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/1.2150887