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- Title
Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes.
- Authors
Wang, Renxin; Bai, Bing; Zhang, Wendong; Cao, Huiliang; Liu, Jun
- Abstract
A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispherical resonator. To realize a symmetric shell and a small gap, a kind of micro-hemispherical resonator (μHR) structure including sandwich-shaped stacks and eave-shaped electrodes has been developed using a glassblowing process. The blowing process could bring favorable surface roughness and symmetry. The locations of the hemispherical shell and surrounding electrodes can be precisely controlled by the designs of sandwich-shaped stacks and eave-shaped electrodes, making it feasible to realize uniform and small gaps. In addition, electrical insulation between the hemispherical shell and eave-shaped electrodes can be guaranteed owing to eave-shaped structure. The fabrication process and results are demonstrated in detail. Furthermore, an estimation method of shell thickness in a nondestructive manner is proposed, with deviation below 5%. Taking asymmetry, surface roughness, and gap into consideration, these results preliminarily indicate this structure with a hemispherical shell and surrounding eave-shaped electrodes is promising in hemispherical resonator applications.
- Subjects
ELECTRODES; ELECTRIC insulators &; insulation; QUALITY factor; SURFACE roughness; GLASS blowing &; working
- Publication
Micromachines, 2021, Vol 12, Issue 7, p815
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi12070815