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- Title
Holographic Fabrication of 3D Nanostructures.
- Authors
Jeon, Taeyoon; Kim, Dong‐Ho; Park, Sung‐Gyu
- Abstract
In this paper, the authors review the optical principles underlying the fabrication of 3D periodic nanostructures prepared using holographic lithography (HL) as well as their applications toward chemical sensors and energy storage devices using 3D functional nanomaterials. HL is potentially useful for the simple and rapid fabrication of defect‐free large‐area periodic nanostructures with various structural geometries. The use of optical elements, such as well‐designed prisms and diffraction gratings, improves the reproducibility of the manufacturing process by simplifying complicated optical setups. 3D functional nanostructures, including semiconductor and metallic nanomaterials, are useful in highly sensitive photonic crystals and plasmonic sensors, and high‐performance 3D electrodes for use in energy production and storage devices. Holographic lithography is a powerful technique for fabricating uniform 3D nanostructures over large areas. By controlling the wavevector, polarization, and phase, a variety of 3D nanostructures may be generated using a single laser exposure. The high surface area, porosity, and periodicity of 3D nanostructures render them useful as energy storage electrodes and optical and mechanical sensors.
- Subjects
HOLOGRAPHIC gratings; NANOFABRICATION; NANOSTRUCTURES; ENERGY storage; DIFFRACTION gratings
- Publication
Advanced Materials Interfaces, 2018, Vol 5, Issue 18, pN.PAG
- ISSN
2196-7350
- Publication type
Article
- DOI
10.1002/admi.201800330