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- Title
Growth of Thin Graphite Films on a Dielectric Substrate using Heteroepitaxial Synthesis.
- Authors
Sorokin, I. A.; Kolodko, D. V.; Luzanov, V. A.; Shustin, E. G.
- Abstract
A technique for growing thin graphite films on a dielectric substrate by annealing the Al2O3(0001)/Ni(111)/ta-C structure has been optimized. This technique is based on catalytic decomposition of hydrocarbons on the surface of a single-crystal catalyst metal film on a dielectric substrate and subsequent diffusion and crystallization of carbon between the metal film and the substrate. A thin graphite film with a low density of crystal-structure defects is obtained on the dielectric substrate after chemical etching of the metal film.
- Subjects
DIELECTRIC thin films; CARBON films; METALLIC films; DIELECTRIC films; THIN films; METAL catalysts; METALLIC thin films; GRAPHITE
- Publication
Technical Physics Letters, 2020, Vol 46, Issue 5, p497
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785020050260