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- Title
QUALITY ASSURANCE TECHNOLOGIES FOR VLSI MANUFACTURING.
- Authors
Kohoutek, Henry J.
- Abstract
Considering the fundamental aims of VLSI Manufacturing and objectives of the Quality Assurance and Quality Control programs, three technologies, namely Dimensional Metrology, Material Analysis, and Statistical Methods of Process Control, emerge as key to success. The bewildering array of methods, instrumentation alternatives, and process states and variables to be controlled, make Quality Assurance and control activities as complex as the VLSI manufacturing itself, and demand a long-term commitment by all management, engineering, and work force teams involved.
- Subjects
METROLOGY; QUALITY assurance; PROCESS control systems; QUALITY control; MATERIALS; STATISTICS
- Publication
Quality & Reliability Engineering International, 1987, Vol 3, Issue 2, p107
- ISSN
0748-8017
- Publication type
Article
- DOI
10.1002/qre.4680030208