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- Title
How to supply a CVD reactor with a steady-state mixture of two precursors vaporized from a single heated boat.
- Authors
Peev, Georgi; Peshev, Dimitar
- Abstract
The interest in CVD of two-component and multicomponent layers is due to their application and advantage over the mono-component ones established in various cases. The syntheses of new metal-organic compounds offer possibilities for such deposition. In the same time, the requirements to the exact dosage of the precursors also increase as to obtain a constant components ratio along the layers height. In some investigations, home-made equipment for CVD is used wherein the precursors are vaporized in the carrier gas from their mixture in a single heated boat made of appropriate material. In the present report on the example of several two-component mixtures of precursors, a theoretical analysis of the vapor-gas phase alterations due to the different precursor vapor pressures is demonstrated. The considerable changes shown indicate possibility for deposition of non-homogeneous layers. To avoid this phenomenon, a change of the boat construction is suggested. It is based on an equation for the kinetics of vaporization from a flat surface into a flowing gas phase and a formula for the diffusivity coefficient in a binary gas mixture. The boat dimensions for the studied precursor mixtures are determined. An approach for experimental correction of the calculated boat construction is also suggested.
- Subjects
CHEMICAL precursors; CARBON compounds; VAPOR pressure; CHEMICAL vapor deposition; CHEMICAL synthesis
- Publication
Physica Status Solidi. A: Applications & Materials Science, 2015, Vol 212, Issue 7, p1527
- ISSN
1862-6300
- Publication type
Article
- DOI
10.1002/pssa.201532339