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- Title
Study of Ion-Assisted E-Beam Evaporation Coating Process on Chirped Mirrors.
- Authors
Chen, Yu-Long; Wang, Pei-Jen
- Abstract
A chirped mirror designed with 60 fs2 in group delay dispersion and reflectance large than 97.5% in the bandwidth between 700 and 900 nm by open-sourced thin film filter design software is presented. The chirped mirrors are then fabricated by an ion-assisted deposition coater. First, the optical constants of the thin films deposited by specific process parameters are calibrated by trial runs with single-layer samples measured by variable-angle spectroscopic ellipsometer; then factors are entered to compensate for the settings on film thickness. Afterward, the spectral phase of the coated mirrors is measured by polarization gating frequency-resolved optical gating whereas the reflectance is measured by photo-spectrometer. In conclusion, the measured results indicate a reasonable match with the design goals to show the effectiveness of the proposed method. It is noted that ion-assisted electron gun evaporation coating systems are applicable to the mass production of chirped mirrors employed for ultrafast lasers.
- Subjects
DICHROIC filters; COATING processes; OPTICAL constants; ELECTRON beams; MIRRORS; FEMTOSECOND pulses
- Publication
Coatings (2079-6412), 2023, Vol 13, Issue 2, p356
- ISSN
2079-6412
- Publication type
Article
- DOI
10.3390/coatings13020356