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- Title
Structural and Optical Properties of SiC/Si Heterostructures Obtained Using Rapid Vacuum-Thermal Carbidization of Silicon.
- Authors
Lobanok, M. V.; Mukhammad, A. I.; Gaiduk, P. I.
- Abstract
A transmission electron microscopy (TEM) investigation revealed that rapid vacuum-thermal carbidization of silicon at 1100°C leads to formation of cubic silicon carbide (SiC) layers. A band in the IR transmission spectrum at 798 cm–1 corresponding to the Si–C stretching vibration and a maximum in the Raman spectrum at 793 cm–1 relating to the transverse optical phonon mode of SiC confirm the formation of a layer of the cubic SiC polytype. The absorption band of Si–O–Si (1100 cm–1) was found using IR spectroscopy. The dependence of the transmission coefficient on wavenumber was determined.
- Subjects
OPTICAL properties; HETEROSTRUCTURES; RAMAN spectroscopy; TRANSMISSION electron microscopy; SILICON carbide
- Publication
Journal of Applied Spectroscopy, 2022, Vol 89, Issue 2, p256
- ISSN
0021-9037
- Publication type
Article
- DOI
10.1007/s10812-022-01352-2