We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Scandium and Obtained by Laser Deposition.
- Authors
Bosak, N. A.; Chumakov, A. N.; Shevchenok, A. A.; Baran, L. V.; Karoza, A. G.; Malutina-Bronskaya, V. V.; Raichenok, T. F.; Sugak, M. G.
- Abstract
Nanostructured thin films on a silicon substrate were obtained by high-frequency pulse-periodic laser action (f ~ 10–15 kHz) with wavelength λ = 1.064 μm and power density q = 85 MW/cm2 on zinc oxide ceramic doped with scandium oxide in a vacuum chamber with pressure p = 2·10–2 mm Hg. The morphology of the obtained films was studied by atomic-force microscopy. Features of the transmission spectra in the visible and near and middle infrared regions were shown. The luminescence spectra obtained by excitation at various wavelengths were practically unchanged. The electrophysical properties of the ZnO + 0.9% Sc2O3/Si heterostructure were analyzed. It was established that the main conduction mechanism is current limited by space charge in an oxide film with deep traps.
- Subjects
ZINC oxide thin films; OPTICAL properties; LASER deposition; SILICON films; OXIDE coating; ZINC oxide
- Publication
Journal of Applied Spectroscopy, 2020, Vol 87, Issue 5, p840
- ISSN
0021-9037
- Publication type
Article
- DOI
10.1007/s10812-020-01079-y