Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleDevelopment of Reflow Fill of CGeSbTe Films for Sub‐20 nm Cells in 3D Cross‐Point Memory.AuthorsPark, Jeonghee; Wu, Zhe; Park, Jiho; Kim, Jonguk; Kuh, Bongjin; Lee, Jongmyeong; Hwang, Seungwoo; Han, SeungwuPublicationAdvanced Materials Technologies, 2023, Vol 8, Issue 1, p1ISSN2365-709XPublication typeArticleDOI10.1002/admt.202200887