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- Title
P-158L: Late-News Poster: Development of A Silicon Process with Device Mobility >500 Cm<sup>2</sup>/V-Sec Suitable for a Large-Area Display Backplane Using Embedded Single-Crystal Silicon Particles.
- Authors
Chen, Feng; Tarighat, Roohollah Samadzadeh; Hill, Graham; Vieth, John; Sivoththaman, Siva; Dykaar, Douglas R.
- Abstract
We report device mobility >500 cm2/V·s in a scalable process suitable for electronic backplanes for large area OLED displays. Ceramic substrates as large as 4×4 inches were fabricated utilizing planarized regions of Single Crystal Silicon (SCS).
- Subjects
ORGANIC light emitting diodes; SINGLE crystals; PARTICULATE matter; CRYSTALS; ACETYLENE crystals
- Publication
SID Symposium Digest of Technical Papers, 2015, Vol 46, Issue 1, p1334
- ISSN
0097-966X
- Publication type
Article
- DOI
10.1002/sdtp.10113