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- Title
Structural and Optical Properties of Zn<sub>1-x</sub>Mg<sub>x</sub>O Thin Films Synthesized with Metal Organic Chemical Vapor Deposition.
- Authors
Park, S.-H.; Kim, K.-B.; Seo, S.-Y.; Kim, S.-H.; Han, S.-W.
- Abstract
We present the structural and optical properties of Zn1-xMgxO thin films studied using x-ray diffraction (XRD), extended x-ray absorption fine structure (EXAFS), and photoluminescence (PL) measurements. The Zn1-xMgxO films on sapphire [0001] substrates were fabricated with metal organic chemical vapor deposition (MOCVD). The XRD measurements showed that the Zn1-xMgxO films (x ≤ 0.05) had a wurtzite structure without any MgO phase and were epitaxially grown along the c-axis of the Al2O3 substrate. The lattice constant of the Zn0.95Mg0.05O filmshrank by 0.023 Å , compared with that of ZnO crystals. From the EXAFS measurements on the Zn1-xMgxO films at Zn K-edge, we found a substantial amount of distortion in the bond length of Zn-Zn pairs with a small amount of Mg substitution on the Zn site. The PL measurements showed a gradual increment of the main exciton transitions from 3.36 eV (x = 0.0) to 3.57 eV (x = 0.05) at 10 K. We also observed a strong deep-level emission near 2.3 eV from the specimen with x = 0.05.
- Subjects
OPTICS; THIN films; X-ray diffraction; PHOTOLUMINESCENCE; METAL organic chemical vapor deposition
- Publication
Journal of Electronic Materials, 2006, Vol 35, Issue 8, p1680
- ISSN
0361-5235
- Publication type
Article
- DOI
10.1007/s11664-006-0217-7